Vacuum Components


Vacuum Component Repair & Remanufacturing for Semiconductor Manufacturing Equipment

PSI Semicon Services is the one company that invests in supporting and upgrading the very same legacy equipment that the semiconductor OEMs attempt to leave behind.

Semiconductor tool sectors like CVD, PVD, Etch, and others depend on high-performance vacuum technology. In all instances, vacuum pumps and controllers are complex and labor-intensive repairs that require a high degree of specialization to be successful. It is critical to maintain these parts — and when they fail, you need a reliable supplier ready at a moment’s notice to help you get back to full strength in terms of uptime and production capacity.

At PSI Semicon Services, we can repair pumps such as Dryvac, Turbovac, and others. We have experience with all types of manufacturers including Edwards, Ebara, and Leybold. We can also repair leak detectors, chucks, and particle measurement tools.

We invest in the most advanced diagnostic equipment and we employ the most complete and thorough after-repair test procedures in the industry. We perform bench and system tests to ensure that every repaired vacuum component will operate correctly back in your plant.

Beyond repairs, legacy vacuum equipment can be kept intact, sustained, and modernized by correcting design flaws, remanufacturing unsalvageable parts, and integrating newer-generation components. Our upgrade services will improve system performance and sophistication, add new features and capabilities, and prevent unplanned failures and/or future downtime.

With PSI Semicon Services, you get it all — fast service, quality repairs by trained technicians, and a One Year from Date of Shipment Warranty. Production downtime means lost revenue, so why put up with the long lead times your OEM is offering? We will turn your vacuum components around in record time at a price you’ll love.

• Priority Service Available
• Fast Turnaround Time
• Legacy Tools Support
• One Year from Date-of-Shipment-Warranty
• Registered ISO 9001:2000

Call us direct at 800-325-4774 or fill out the form here and our Customer Service team will contact you immediately!